Letter of Acceptance (LoA)
No: 2025/icoabcd/1571199152Virtual Metrology of Semiconductor HDP Processes Using an Ensemble Machine Learning Model
Authors: Ya Wei Chen (China Resources Microelectronics Limited, China & CRMicro, China); Shaohua Chang and Eric Chien (China Resources Microelectronics Limited, China)has been accepted on ICoABCD 2025Track: Data Analytics
Bandung, 6 November 2025 General Chair Hilal H. Nuha, Ph.D